Based on the summarization of domestic situation and abroad, at present, most inertial piezoelectric moving mechanism realize directional motion by using the appropriate mechanical structure with combination of the inverse piezoelectric effect of piezoelectric elements, which is cotrolled orderly by the suitable circuit system.

本文在分析了目前国内外惯性压电驱动器研究现状的基础上,结合国家自然科学基金项目“新式微型惯性压电移动机构驱动理论及实验研究”(No。